JPS6230030Y2 - - Google Patents
Info
- Publication number
- JPS6230030Y2 JPS6230030Y2 JP1983064123U JP6412383U JPS6230030Y2 JP S6230030 Y2 JPS6230030 Y2 JP S6230030Y2 JP 1983064123 U JP1983064123 U JP 1983064123U JP 6412383 U JP6412383 U JP 6412383U JP S6230030 Y2 JPS6230030 Y2 JP S6230030Y2
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- cleaning
- support
- cleaning device
- high speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 28
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 5
- 239000011521 glass Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983064123U JPS59170852U (ja) | 1983-04-28 | 1983-04-28 | フオトマスク洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983064123U JPS59170852U (ja) | 1983-04-28 | 1983-04-28 | フオトマスク洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59170852U JPS59170852U (ja) | 1984-11-15 |
| JPS6230030Y2 true JPS6230030Y2 (en]) | 1987-08-01 |
Family
ID=30194307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1983064123U Granted JPS59170852U (ja) | 1983-04-28 | 1983-04-28 | フオトマスク洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59170852U (en]) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2645425B2 (ja) * | 1985-03-04 | 1997-08-25 | 松下冷機株式会社 | 伝熱管壁面の製造方法 |
| JPH0528759Y2 (en]) * | 1985-03-23 | 1993-07-23 | ||
| JPH0695508B2 (ja) * | 1986-11-28 | 1994-11-24 | 大日本スクリ−ン製造株式会社 | 基板の両面洗浄装置 |
| JP3964517B2 (ja) * | 1997-10-31 | 2007-08-22 | 芝浦メカトロニクス株式会社 | 洗浄装置とその方法 |
| JP6811882B2 (ja) * | 2020-01-23 | 2021-01-13 | 株式会社東京精密 | 洗浄装置 |
-
1983
- 1983-04-28 JP JP1983064123U patent/JPS59170852U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59170852U (ja) | 1984-11-15 |
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